Mura detection apparatus and method

专利名称：Mura detection apparatus and method发明人：Jeffrey A. Hawthorne,Joseph Setzer申请号：US08/651417申请日：19960522公开号：US05917935A公开日：19990629

摘要：A method and apparatus for identifying and classifying pixel defects, and inparticular Mura defects using digital processing techniques. The present method includessteps of acquiring an image with a Mura defect, and performing a Laplacian convolutionon the image to enhance the Mura defect against background illumination. A step ofthresholding the Mura defect against the background illumination is also provided. Thethresholded Mura defect is compared against the original Mura defect to definestatistical parameters of the original Mura defect. An annular region is defined aroundthe periphery of the Mura defect. Statistics of the annular region defines statistics forbackground illumination as compared to the original Mura defect. The statistics from theMura defect are then compared to the background illumination statistics for Mura defectclassification and analysis.

申请人：PHOTON DYNAMICS, INC.

代理机构：Townsend and Townsend and Crew LLP

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