SENSOR DEVICE AND METHOD FOR MANUFACTURING SAME

专利名称：SENSOR DEVICE AND METHOD FOR

MANUFACTURING SAME

发明人：OKUDO, Takafumi,SUZUKI, Yuji,TAKEGAWA,

Yoshiyuki,BABA, Toru,GOTOU,Kouji,MIYAJIMA, Hisakazu,KATAOKA,Kazushi,SAIJO, Takashi

申请号：EP06833259.2申请日：20061124公开号：EP1953816A1公开日：20080806

专利附图：

摘要：A sensor device having small variations in sensor characteristics and improvedresistance to electrical noise is provided. This sensor device has a sensor unit, which isprovided with a frame having an opening, a movable portion held in the opening to bemovable relative to the frame, and a detecting portion for outputting an electric signalaccording to a positional displacement of the movable portion, and a package substratemade of a semiconductor material, and bonded to a surface of the sensor unit. Thepackage substrate has an electrical insulating film on a surface facing the sensor unit. Thepackage substrate is bonded to the sensor unit by forming a direct bonding between anactivated surface of the electrical insulating film and an activated surface of the sensorunit at room temperature.

申请人：MATSUSHITA ELECTRIC WORKS, LTD.

地址：1048, Oaza-Kadoma Kadoma-shi, Osaka-fu 571-8686 JP

国籍：JP

代理机构：Appelt, Christian W.

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